Share Email Print
cover

Proceedings Paper

Average power scaling of UV excimer lasers drives flat panel display and lidar applications
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Average power scaling of 308nm excimer lasers has followed an evolutionary path over the last two decades driven by diverse industrial UV laser microprocessing markets. Recently, a new dual-oscillator and beam management concept for high-average power upscaling of excimer lasers has been realized, for the first time enabling as much as 1.2kW of stabilized UV-laser average output power at a UV wavelength of 308nm. The new dual-oscillator concept enables low temperature polysilicon (LTPS) fabrication to be extended to generation six glass substrates. This is essential in terms of a more economic high-volume manufacturing of flat panel displays for the soaring smartphone and tablet PC markets. Similarly, the cost-effective production of flexible displays is driven by 308nm excimer laser power scaling. Flexible displays have enormous commercial potential and can largely use the same production equipment as is used for rigid display manufacturing. Moreover, higher average output power of 308nm excimer lasers aids reducing measurement time and improving the signal-to-noise ratio in the worldwide network of high altitude Raman lidar stations. The availability of kW-class 308nm excimer lasers has the potential to take LIDAR backscattering signal strength and achievable altitude to new levels.

Paper Details

Date Published: 8 February 2012
PDF: 10 pages
Proc. SPIE 8238, High Energy/Average Power Lasers and Intense Beam Applications VI; Atmospheric and Oceanic Propagation of Electromagnetic Waves VI, 82380A (8 February 2012); doi: 10.1117/12.906687
Show Author Affiliations
Ludolf Herbst, Coherent GmbH (Germany)
Ralph F. Delmdahl, Coherent GmbH (Germany)
Rainer Paetzel, Coherent GmbH (Germany)


Published in SPIE Proceedings Vol. 8238:
High Energy/Average Power Lasers and Intense Beam Applications VI; Atmospheric and Oceanic Propagation of Electromagnetic Waves VI
Steven J. Davis; Michael C. Heaven; J. Thomas Schriempf, Editor(s)

© SPIE. Terms of Use
Back to Top