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Proceedings Paper

One-dimensional light modulator
Author(s): S. Sinning; I. Wullinger; J.-U. Schmidt; M. Friedrichs; U. Dauderstädt; S. Wolschke; T. Hughes; D. Pahner; M. Wagner
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Paper Abstract

Facing the recent developments in the area of (quasi) continuous wave lasers towards higher power the Fraunhofer IPMS introduces a novel light modulator incorporating an innovative architecture optimized for high laser power applications requiring a fast device. As a novelty each pixel is composed of a number of micro mirrors, aligned in a row. That approach allows for, in principle, very long pixels with uniform surface properties. This concept in turn results in reduction of power density at the light modulator surface and hence opens the way to high power applications allowing power densities in the range of several ten W/cm2 at the light modulator surface. Each pixel can be switched to black, white or even arbitrary gray values with very high speed. This paper summarizes the device design, working concept, mechanical properties for both static and dynamic operation, and surface properties. Application relevant subjects as stability under intense laser illumination complete the discussion.

Paper Details

Date Published: 16 February 2012
PDF: 7 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520H (16 February 2012); doi: 10.1117/12.906651
Show Author Affiliations
S. Sinning, Fraunhofer Institute for Photonic Microsystems (Germany)
I. Wullinger, Fraunhofer Institute for Photonic Microsystems (Germany)
J.-U. Schmidt, Fraunhofer Institute for Photonic Microsystems (Germany)
M. Friedrichs, Fraunhofer Institute for Photonic Microsystems (Germany)
U. Dauderstädt, Fraunhofer Institute for Photonic Microsystems (Germany)
S. Wolschke, Fraunhofer Institute for Photonic Microsystems (Germany)
T. Hughes, Fraunhofer Institute for Photonic Microsystems (Germany)
D. Pahner, Fraunhofer Institute for Photonic Microsystems (Germany)
M. Wagner, Fraunhofer Institute for Photonic Microsystems (Germany)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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