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Proceedings Paper

Tuning of random rough surface statistics for optoelectronics
Author(s): Vincent Brissonneau; Ludovic Escoubas; François Flory; Gérard Berginc; Jean-Jacques Simon
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Paper Abstract

Optical surface structuration is of primary interest for applications such as photovoltaics or photodetectors. Over last years, periodical patterns allowing antireflective effects with efficient properties have been designed and fabricated. Some specific issues such as diffraction of undesired high energy orders are a direct consequence of the periodical nature of this kind of pattern. Random rough surfaces allow the antireflective effect without these undesired diffraction effects. By tuning their statistics, random rough surfaces offer new degrees of freedom for antireflection but also for controlling the scattering (polarization, spatial distribution). The two main parameters of such surfaces are the height probability density function and the autocorrelation function. The height probability density function carries information about height of the structures. The autocorrelation function is a representation of the lateral distribution of the surface. Our photofabrication method uses a speckle pattern recorded on a photoresist. By controlling the exposure parameters, such as the number of exposure and the beam intensity distribution, one is able to control the statistics of the speckle, and so of the photofabricated surfaces. Using a chromatic confocal sensor, height mapping of these surfaces are performed. From these mappings, the height probability density and the correlation function are calculated. The experimental statistics are compared with the predicted theoretical ones showing a good agreement. Results are presented showing a significant modification of the statistics of the photofabricated surfaces.

Paper Details

Date Published: 15 February 2012
PDF: 8 pages
Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490T (15 February 2012); doi: 10.1117/12.906601
Show Author Affiliations
Vincent Brissonneau, Thales Optronique S.A. (France)
Institut Matériaux Microélectronique Nanosciences de Provence, Aix Marseille Univ. (France)
Ludovic Escoubas, Institut Matériaux Microélectronique Nanosciences de Provence, Aix Marseille Univ. (France)
François Flory, Institut Matériaux Microélectronique Nanosciences de Provence, Ecole Centrale Marseille (France)
Gérard Berginc, Thales Optronique S.A. (France)
Jean-Jacques Simon, Institut Matériaux Microélectronique Nanosciences de Provence, Aix Marseille Univ. (France)


Published in SPIE Proceedings Vol. 8249:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann, Editor(s)

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