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Proceedings Paper

Laser-chemical precision machining of micro forming tools at low laser powers
Author(s): Salar Mehrafsun; Peiran Zhang; Frank Vollertsen; Gert Goch
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Paper Abstract

Micro forming tools require high surface quality as well as contour accuracy, i.e. close tolerances at small dimensions. However, their structuring with necessary accuracy is limited to a small number of applicable technologies due to the mechanical properties of the tool material on micro scale. This contribution reports on an approach for machining techniques for precise tool finishing, developed at Bremer Institut für angewandte Strahltechnik GmbH (BIAS) called Laser-Jet-Process (LJP). This approach is based on a laser-chemical etching method where a focused laser beam is guided coaxially to an etchant jet-stream onto the material surface. The material removal is a result of laser-induced chemical reactions between etchant and surface at low laser powers. The evaluation of data shows a strong correlation of material removal and several process variables. In particular, high laser powers combined with high feed rates of the work piece and low flow rates of the etchant result in a break-off in material removal. In order to overcome this issue, the process boundaries have been experimentally determined and implemented in a quality control system. The quality control system consists of an automated path planning model and an inverse process model. The automated path planning model computes position and Gaussian intensity profile for a sequence of overlapping laser removal paths to achieve the desired tool shape. The inverse process model renders specific process variables for every single removal path from a pre-assembled data pool within experimentally defined boundary conditions.

Paper Details

Date Published: 20 February 2012
PDF: 7 pages
Proc. SPIE 8244, Laser-based Micro- and Nanopackaging and Assembly VI, 82440K (20 February 2012); doi: 10.1117/12.906376
Show Author Affiliations
Salar Mehrafsun, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Peiran Zhang, Bremer Institut für Messtechnik, Automatisierung und Qualitätswissenschaft (Germany)
Frank Vollertsen, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Gert Goch, Bremer Institut für Messtechnik, Automatisierung und Qualitätswissenschaft (Germany)


Published in SPIE Proceedings Vol. 8244:
Laser-based Micro- and Nanopackaging and Assembly VI
Friedrich G. Bachmann; Wilhelm Pfleging; Kunihiko Washio; Jun Amako; Willem Hoving; Yongfeng Lu, Editor(s)

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