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Proceedings Paper

Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes
Author(s): Jong Yeon Park; James E. Gardner; Praveen Pasupathy; Ji Won Suk; Rodney S. Ruoff; Dean P. Neikirk
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Paper Abstract

We present fabrication and characterization of wavelength selective germanium dielectric supported microbolometers using a self-alignment technique to help insure a flat microbolometer membrane. The fabricated microbolometer consists of a resistive absorber sheet on a quarter wavelength germanium layer above a half wavelength air gap, producing dielectric interference [1]. We use a self-aligned process without a polyimide patterning process that helps eliminate deformation and stress in the structure membrane. We demonstrated that the fabricated wavelength selective microbolometers have flat, robust membranes and produce excellent tunable narrowband absorption in MWIR/LWIR band with efficient multi-color IR spectral response using wavelength selective pixels.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520Y (15 February 2012); doi: 10.1117/12.906290
Show Author Affiliations
Jong Yeon Park, The Univ. of Texas at Austin (United States)
James E. Gardner, The Univ. of Texas at Austin (United States)
Praveen Pasupathy, The Univ. of Texas at Austin (United States)
Ji Won Suk, The Univ. of Texas at Austin (United States)
Rodney S. Ruoff, The Univ. of Texas at Austin (United States)
Dean P. Neikirk, The Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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