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Proceedings Paper

Design and modeling of XYθ H type stage using 1 rotational DOF flexure joint
Author(s): Kyoungchon Kim; Daegab Gweon; Namryoung Choi; Dongpyo Hong
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Paper Abstract

It is important that high precision positioning system to cope with development of semiconductor and FPD manufacturing/inspection procedure. In this paper, the H type stage with flexure joint was proposed to compensate the yaw error in H type stage caused by manufacturing error, assembly error, and synchronous error. To implement the yaw motion in H type stage, 1 rotational DOF flexure joint which has high stiffness and endurance was proposed. Conceptual design of H type stage was performed to follow the criteria for precision machine design. The performance of H type stage was verified by real time experiment.

Paper Details

Date Published: 29 October 2011
PDF: 6 pages
Proc. SPIE 8205, 2011 International Conference on Photonics, 3D-Imaging, and Visualization, 820518 (29 October 2011); doi: 10.1117/12.906153
Show Author Affiliations
Kyoungchon Kim, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Daegab Gweon, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Namryoung Choi, Chonbuk National Univ. (Korea, Republic of)
Dongpyo Hong, Chonbuk National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8205:
2011 International Conference on Photonics, 3D-Imaging, and Visualization
Egui Zhu, Editor(s)

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