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Proceedings Paper

Facile and flexible fabrication of gapless microlens arrays using a femtosecond laser microfabrication and replication process
Author(s): Hewei Liu; Feng Chen; Qing Yang; Yang Hu; Chao Shan; Shengguan He; Jinhai Si; Xun Hou
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Paper Abstract

We demonstrate a facile and flexible method to fabricate close-packed microlens arrays (MLAs). Glass molding templates with concave structures are produced by a femtosecond (fs)-laser point-by-point exposures followed by a chemical treatment, and convex MLAs are subsequently replicated on Poly(methyl methacrylate) [PMMA] using a hot embossing system. As an example, a microlens array (MLA) with 60-μm rectangular-shaped spherical microlenses is fabricated. Optical performances of the MLAs, such as focusing and imaging properties are tested, and the results demonstrate the uniformity and smooth surfaces of the MLA. We also demonstrated that the shape and alignment of the arrays could be controlled by different parameters.

Paper Details

Date Published: 16 February 2012
PDF: 6 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430Z (16 February 2012); doi: 10.1117/12.905942
Show Author Affiliations
Hewei Liu, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Yang Hu, Xi'an Jiaotong Univ. (China)
Chao Shan, Xi'an Jiaotong Univ. (China)
Shengguan He, Xi'an Jiaotong Univ. (China)
Jinhai Si, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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