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Proceedings Paper

Application of DMD: laser speckle control for rough surface photofabrication
Author(s): Vincent Brissonneau; Ludovic Escoubas; François Flory; Gérard Berginc
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Paper Abstract

Digital Micromirror Devices are mainly known for display in video projectors. More and more, they are used in industrial or research applications. DMD is a versatile tool for lithography allowing photoresist exposure with easy-changing masking step in direct-patterning. Any application where light shaping is necessary can be considered by using DMD. We here show photofabrication of random rough surfaces using an indirect modified beam exposure. A laser beam is enlarged and scattered by a diffusing element. The scattering from this diffusing surface allows the creation of a speckle pattern with a random light distribution. The intensity is then recorded on a photoresist coated substrate. The patterned photoresist is next developed and an etching step enables the transfer on the silicon. It can be shown that the statistical properties of the speckle pattern can be controlled. The intensity distribution is modified by the number of exposures and the correlation function is linked to the spatial distribution of the laser beam. Some examples of such photofabrication can be found using a Gaussian unmodified beam leading to Gaussian correlation photofabricated surfaces. In order to design random rough surfaces having a non Gaussian correlation we need to modify the laser beam shape. This modification is achieved using a DMD. The experimental processes from photoresist deposition to modified exposure are discussed in this paper.

Paper Details

Date Published: 13 February 2012
PDF: 7 pages
Proc. SPIE 8254, Emerging Digital Micromirror Device Based Systems and Applications IV, 82540N (13 February 2012); doi: 10.1117/12.905856
Show Author Affiliations
Vincent Brissonneau, Thales Optronique S.A. (France)
Institut Matériaux Microélectronique Nanosciences de Provence, Aix Marseille Univ. (France)
Ludovic Escoubas, Institut Matériaux Microélectronique Nanosciences de Provence, Aix Marseille Univ. (France)
François Flory, Institut Matériaux Microélectronique Nanosciences de Provence, Ecole Centrale Marseille (France)
Gérard Berginc, Thales Optronique S.A. (France)


Published in SPIE Proceedings Vol. 8254:
Emerging Digital Micromirror Device Based Systems and Applications IV
Michael R. Douglass; Patrick I. Oden, Editor(s)

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