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Proceedings Paper

Direct investigation of the ablation rate evolution during laser drilling of high-aspect-ratio micro-holes
Author(s): Francesco P. Mezzapesa; Teresa Sibillano; Lorenzo L. Columbo; Francesca Di Niso; Antonio Ancona; Maurizio Dabbicco; Francesco De Lucia; Pietro M. Lugarà; Gaetano Scamarcio
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Paper Abstract

The recent development of ultrafast laser ablation technology in precision micromachining has dramatically increased the demand for reliable and real-time detection systems to characterize the material removal process. In particular, the laser percussion drilling of metals is lacking of non-invasive techniques able to monitor into the depth the spatial- and time-dependent evolution all through the ablation process. To understand the physical interaction between bulk material and high-energy light beam, accurate in-situ measurements of process parameters such as the penetration depth and the removal rate are crucial. We report on direct real time measurements of the ablation front displacement and the removal rate during ultrafast laser percussion drilling of metals by implementing a contactless sensing technique based on optical feedback interferometry. High aspect ratio micro-holes were drilled onto steel plates with different thermal properties (AISI 1095 and AISI 301) and Aluminum samples using 120-ps/110-kHz pulses delivered by a microchip laser fiber amplifier. Percussion drilling experiments have been performed by coaxially aligning the diode laser probe beam with the ablating laser. The displacement of the penetration front was instantaneously measured during the process with a resolution of 0.41 μm by analyzing the sawtooth-like induced modulation of the interferometric signal out of the detector system.

Paper Details

Date Published: 16 February 2012
PDF: 7 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430S (16 February 2012); doi: 10.1117/12.905758
Show Author Affiliations
Francesco P. Mezzapesa, Univ. degli Studi di Bari (Italy)
CNR-IFN UOS Bari (Italy)
Teresa Sibillano, CNR-IFN UOS Bari (Italy)
Lorenzo L. Columbo, CNR-IFN UOS Bari (Italy)
Francesca Di Niso, Univ. degli Studi di Bari (Italy)
Antonio Ancona, CNR-IFN UOS Bari (Italy)
Maurizio Dabbicco, Univ. degli Studi di Bari (Italy)
CNR-IFN UOS Bari (Italy)
Francesco De Lucia, Univ. degli Studi di Bari (Italy)
Pietro M. Lugarà, Univ. degli Studi di Bari (Italy)
CNR-IFN UOS Bari (Italy)
Gaetano Scamarcio, Univ. degli Studi di Bari (Italy)
CNR-IFN UOS Bari (Italy)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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