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Surface warpage measurement of diamond grid disk by shadow Moiré methodFormat | Member Price | Non-Member Price |
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Paper Abstract
Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface
warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical
planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface warpage of diamond
grid disks. To eliminate erroneous bright or black spots caused by the diamond grids, a novel method is proposed by selecting proper
threshold values from the addition of four phase-shifted images, and from the grey-level difference between the addition of phases 0
and π images and the addition of phases π/2 and 3π/2 images. Test of the proposed method on real specimens show that the erroneous
bright and black spots can be effectively identified and patched. Thereafter the phase can be unwrapped successfully to obtain the
surface profile and thus the warpage of specimens.
Paper Details
Date Published: 15 November 2011
PDF: 8 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83213R (15 November 2011); doi: 10.1117/12.905441
Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)
PDF: 8 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83213R (15 November 2011); doi: 10.1117/12.905441
Show Author Affiliations
Terry Yuan-Fang Chen, National Cheng Kung Univ. (Taiwan)
Jian-Shiang Chen, National Cheng Kung Univ. (Taiwan)
Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)
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