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Proceedings Paper

Wedge angle measurement of transparent objects by adopting transmitted differential interference contrast technique
Author(s): Sheng-Kang Yu; Wei-Lun Chen; Ting-Kun Liu; Shih-Chieh Lin
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Paper Abstract

Effects of the wedge prism angle on the accuracy of angle measurement using the transmitted phase shifting differential interference contrast (DIC) technique were studied in this paper. The optical model was constructed and serious of simulations were conducted to fulfill this study. Various prism angles were tested in the simulations. As expected, results indicated that the reconstructed wedge angle measured by the DIC system was incorrect because the light propagation became irregular. Regardless of the profile reconstruction result, the original optical path differences of light were highly correlated to the prism angle. Therefore, modification is needed to calculate the wedge angle accurately when the DIC approach is adopted. It is also found that the magnification of the objective lens (correspond to the numerical aperture and the working distance) have significant effects on the measurement. These results suggest that modification is needed to calculate the wedge angle accurately when the DIC approach is adopted. This study might provide some valuable information for adopting the DIC technique when it comes to complex geometry measurement in the future.

Paper Details

Date Published: 15 November 2011
PDF: 8 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83212U (15 November 2011); doi: 10.1117/12.905172
Show Author Affiliations
Sheng-Kang Yu, National Tsing Hua Univ. (Taiwan)
Wei-Lun Chen, National Tsing Hua Univ. (Taiwan)
Ting-Kun Liu, Industrial Technology Research Institute (Taiwan)
Shih-Chieh Lin, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)

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