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Proceedings Paper

Subwavelength binary blazed grating optical switch based on TiO2-on-SiO2
Author(s): Junbo Yang; Zhou Wei; Hualiang Zhang; Xueao Zhang; Honghui Jia; Shiqiao Qin
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Paper Abstract

A high-perform and compact subwavelength binary blazed grating optical switch was designed based on TiO2-on-SiO2. By appropriate choice of grating parameters including thicknesses, periods, height, and fill factor, to optimize the diffraction properties, a relative high diffraction efficiency and large diffraction angle was obtained simultaneously. The diffraction efficiency of the first switching channel is about 80% with a 45° diffraction angle, and the diffraction efficiency of the second channel is around 90% with a 30° diffraction angle. The device layout is simple, feasible, one-step etch, and compatible with standard CMOS technology processing.

Paper Details

Date Published: 29 November 2011
PDF: 9 pages
Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 82020X (29 November 2011); doi: 10.1117/12.905171
Show Author Affiliations
Junbo Yang, National Univ. of Defense Technology (China)
Zhou Wei, National Univ. of Defense Technology (China)
Hualiang Zhang, National Univ. of Defense Technology (China)
Xueao Zhang, National Univ. of Defense Technology (China)
Honghui Jia, National Univ. of Defense Technology (China)
Shiqiao Qin, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 8202:
2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology

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