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Proceedings Paper

Design of a linear-rotary micro-stage
Author(s): Yuxin Peng; Yasumasa Sakurai; Yoshikazu Arai; Yuki Shimizu; Wei Gao
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Paper Abstract

This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm × 8.8 mm × 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θz-direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.

Paper Details

Date Published: 15 November 2011
PDF: 7 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832121 (15 November 2011); doi: 10.1117/12.904884
Show Author Affiliations
Yuxin Peng, Tohoku Univ. (Japan)
Yasumasa Sakurai, Tohoku Univ. (Japan)
Yoshikazu Arai, Tohoku Univ. (Japan)
Yuki Shimizu, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)

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