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Proceedings Paper

Lithography of porous materials for device fabrication
Author(s): Paolo Falcaro; Plinio Innocenzi; Anita J. Hill; Cara Doherty
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Paper Abstract

Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

Paper Details

Date Published: 24 December 2011
PDF: 6 pages
Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82041X (24 December 2011); doi: 10.1117/12.904854
Show Author Affiliations
Paolo Falcaro, Commonwealth Scientific and Industrial Research Organisation (Australia)
Plinio Innocenzi, Univ. degli Studi di Sassari (Italy)
Anita J. Hill, Commonwealth Scientific and Industrial Research Organisation (Australia)
Cara Doherty, Commonwealth Scientific and Industrial Research Organisation (Australia)


Published in SPIE Proceedings Vol. 8204:
Smart Nano-Micro Materials and Devices
Saulius Juodkazis; Min Gu, Editor(s)

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