Share Email Print
cover

Proceedings Paper

Analysis of microstructure heights error of multilayer diffractive optical elements for far infrared optical system
Author(s): Liangliang Yang; Qingfeng Cui; Changxi Xue; Tao Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, the effect of the relative microstructure heights error on the diffraction efficiency of multilayer diffractive optical elements (MLDOEs) is considered. Based on the relationship of diffraction efficiency and diffractive microstructure height, the analysis result of the relative microstructure height error on the diffraction efficiency of MLDOEs for 8-14μm far infrared optical system was present. It is shown that the diffraction efficiency over the whole waveband is above 98.94% for double-layer DOEs when the two relative microstructure heights error are equal and both controlled within ±2%. However, the diffraction efficiency drops quickly when the two relative microstructure heights error changed in the opposite sign. The analysis result can be used for analyzing the effects of microstructure heights error on diffraction efficiency for MLDOEs working in infrared optical system.

Paper Details

Date Published: 5 December 2011
PDF: 10 pages
Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 81970D (5 December 2011); doi: 10.1117/12.904799
Show Author Affiliations
Liangliang Yang, Changchun Univ. of Science and Technology (China)
Qingfeng Cui, Changchun Univ. of Science and Technology (China)
Changxi Xue, Changchun Univ. of Science and Technology (China)
Tao Liu, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 8197:
2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Yunlong Sheng; Han-Ping Shieh; Kimio Tatsuno, Editor(s)

© SPIE. Terms of Use
Back to Top