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Proceedings Paper

Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena
Author(s): Shu-yan Chen; Li Cheng; Xin-jun Xu
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Paper Abstract

The optical performance is severely degraded by surface scattering effects, especially for short wavelength imaging systems. Surface scattering effects is one of important factors degrading imaging performance. Study of non-intuitive surface scatter effects resulting from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, surface scattering numerical model of grazing incidence imaging systems is discussed at first. Then Soft X-ray optical scattering distribution is measured by a soft X-ray reflectometer, for different sample mirrors, wavelength and grazing angle. By dealing with experimental data, different factors effects on surface scattering, such as glancing angle, wavelength and roughness is computed and analysised. It is indicated that the scattering increases as the grazing angle increases, surface roughness increases and the wavelength decreases, and optical system performance decreases.

Paper Details

Date Published: 30 November 2011
PDF: 9 pages
Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 820118 (30 November 2011); doi: 10.1117/12.904732
Show Author Affiliations
Shu-yan Chen, Harbin Engineering Univ. (China)
Li Cheng, Harbin Engineering Univ. (China)
Xin-jun Xu, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 8201:
2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Xinyong Dong; Xiaoyi Bao; Perry Ping Shum; Tiegen Liu, Editor(s)

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