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Proceedings Paper

Design of modern nanofabrication facilities
Author(s): Sarah Beswick; Andrew Smith; Dru Morrish; Daniel J. Day; Saulius Juodkazis; Min Gu
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Paper Abstract

We present a set of practical rules critical for designing and building a modern nanotechnology laboratory, focused on photonic applications in a cleanroom environment. We show the impacts on time, cost and quality of early design decisions and its importance on achieving the final fully functional laboratory. Best practice examples are presented for setting up a modern laboratory/facility, following analysis of the time, cost and quality constraints. The case study presented is the engineering and architectural solution of the nanofabrication cleanroom facility in the Advanced Technology Centre at Swinburne University of Technology, Australia. Set of practical rules is established for the cost and time efficient set up of the nanotechnology facilities for the research and development.

Paper Details

Date Published: 23 December 2011
PDF: 10 pages
Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043K (23 December 2011); doi: 10.1117/12.904711
Show Author Affiliations
Sarah Beswick, Swinburne Univ. of Technology (Australia)
Andrew Smith, Swinburne Univ. of Technology (Australia)
Dru Morrish, Swinburne Univ. of Technology (Australia)
Daniel J. Day, Swinburne Univ. of Technology (Australia)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)
Min Gu, Swinburne Univ. of Technology (Australia)


Published in SPIE Proceedings Vol. 8204:
Smart Nano-Micro Materials and Devices
Saulius Juodkazis; Min Gu, Editor(s)

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