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Proceedings Paper

Design and fabrication of photonic crystals in epitaxial-free silicon for ultrathin solar cells
Author(s): Xianqin Meng; Valerie Depauw; Guillaume Gomard; Ounsi El Daif; Christos Trompoukis; Emmanuel Drouard; Alain Fave; Frederic Dross; Ivan Gordon; Christian Seassal
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Paper Abstract

In this paper, we present the integration of an absorbing photonic crystal within a thin film photovoltaic solar cell. Optical simulations performed on a complete solar cell revealed that patterning the epitaxial crystalline silicon active layer as a 1D and 2D photonic crystal enabled to increase its integrated absorption by 37%abs and 68%absbetween 300 nm and 1100 nm, compared to a similar but unpatterned stack. In order to fabricate such promising cells, a specific fabrication processes based on holographic lithography, inductively coupled plasma etching and reactive ion etching has been developed and implemented to obtain ultrathin patterned solar cells.

Paper Details

Date Published: 17 December 2011
PDF: 7 pages
Proc. SPIE 8312, Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy III, 831207 (17 December 2011); doi: 10.1117/12.904383
Show Author Affiliations
Xianqin Meng, Institut des Nanotechnologies de Lyon, CNRS, Univ. de Lyon (France)
Ecole Centrale de Lyon (France)
INSA de Lyon (France)
Valerie Depauw, IMEC vzw (Belgium)
Guillaume Gomard, Institut des Nanotechnologies de Lyon, CNRS, Univ. de Lyon (France)
Ecole Centrale de Lyon (France)
INSA de Lyon (France)
Ounsi El Daif, IMEC vzw (Belgium)
Christos Trompoukis, IMEC vzw (Belgium)
Emmanuel Drouard, Institut des Nanotechnologies de Lyon, CNRS, Univ. de Lyon (France)
Ecole Centrale de Lyon (France)
Alain Fave, Institut des Nanotechnologies de Lyon, CNRS, Univ. de Lyon (France)
INSA de Lyon (France)
Frederic Dross, IMEC vzw (Belgium)
Ivan Gordon, IMEC vzw (Belgium)
Christian Seassal, Institut des Nanotechnologies de Lyon, CNRS, Univ. de Lyon (France)
Ecole Centrale de Lyon (France)


Published in SPIE Proceedings Vol. 8312:
Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy III
Min Gu, Editor(s)

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