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Proceedings Paper

High precision measurement system based on coplanar XY-stage
Author(s): Kuang-Chao Fan; Jin-Wei Miao; Wei Gong; You-Liang Zhang; Fang Cheng
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Paper Abstract

A coplanar XY-stage, together with a high precise measurement system, is presented in this paper. The proposed coplanar XY-stage fully conforms to the Abbe principle. The symmetric structural design is considered to eliminate the structure deformation due to force and temperature changes. For consisting of a high precise measurement system, a linear diffraction grating interferometer(LDGI) is employed as the position feedback sensor with the resolution to 1 nm after the waveform interpolation, an ultrasonic motor HR4 is used to generate both the long stroke motion and the nano positioning on the same stage. Three modes of HR4 are used for positioning control: the AC mode in continuous motion control for the long stroke; the gate mode to drive the motor in low velocity for the short stroke; and the DC mode in which the motor works as a piezo actuator, enabling accurate positioning of a few nanometers. The stage calibration is carried out by comparing the readings of LDGI with a Renishaw laser interferometer and repeated 5 times. Experimental results show the XY-stage has achieved positioning accuracy in less than 20nm after the compensation of systematic errors, and standard deviation is within 20 nm for travels up to 20 mm.

Paper Details

Date Published: 15 November 2011
PDF: 5 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832119 (15 November 2011); doi: 10.1117/12.904072
Show Author Affiliations
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Jin-Wei Miao, Hefei Univ. of Technology (China)
Wei Gong, Hefei Univ. of Technology (China)
You-Liang Zhang, Hefei Univ. of Technology (China)
Fang Cheng, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)

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