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Proceedings Paper

The machining precision analysis of the ion beam figuring system
Author(s): Tingwen Xing; Yun Li; Xin Jia; Jiajun Xu
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Paper Abstract

The ion beam figuring machine is a kind of high precise machining facility for optical components. In the field of optical fabrication, the machining precision is always an important capability for the machining facility. The basic structures and working principles of the ion beam figuring system are primarily introduced. And then, various errors which may reduce the final machining precision have been analyzed through theories analysis and computer simulations. The errors include: the approximate error from the discrete compute model to the actual continuum machining model; the system error and random error of the high precision 3-axis motion stage which drives the ion source; the system error and random error of the material removal rate of the ion source. A set of potential error parameters has been given for each part of the ion beam figuring system. By using this set of parameters, it is possible to reach the nano-level machining. The precision analysis in the paper will be a reference for ion beam figuring.

Paper Details

Date Published: 16 November 2011
PDF: 6 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210N (16 November 2011); doi: 10.1117/12.903773
Show Author Affiliations
Tingwen Xing, Institute of Optics and Electronics (China)
Yun Li, Institute of Optics and Electronics (China)
Graduate School of the Chinese Academy of Sciences (China)
Xin Jia, Institute of Optics and Electronics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jiajun Xu, Institute of Optics and Electronics (China)
Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)

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