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Proceedings Paper

Responsivity determination of a hydrogenated amorphous silicon micro-bolometer array
Author(s): A. Orduña-Díaz; M. Rojas-López; R. Delgado-Macuil; Alfonso Torres-Jácome; F. J. De la Hidalga-Wade; Daniel Ferrusca; Salvador Ventura-Gonzalez; C. G. Treviño-Palacios
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Paper Abstract

We present the characterization of a boron doped hydrogenated amorphous silicon (a-Si:H) thermosensor bolometer array for far infrared detection. The array was fabricated over a silicon wafer on a 0.4 μm silicon-nitride (Si3N4) layer. Wet bulk micromachining was used to create pixels of suspended nitride film by removing the silicon underneath. On this film, a boron doped a-Si:H layer was deposited using a low frequency PECVD system at 540 K. Conventional lithography was used to define the bolometers on the nitride windows, and the 5 × 5 microbolometer array was fabricated and characterized at 77 K. A 1.17 x 10-2 mA/W responsivity, with a temperature coefficient of resistance (TCR) of 4.25%, were obtained.

Paper Details

Date Published: 2 November 2011
PDF: 6 pages
Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 80111V (2 November 2011); doi: 10.1117/12.903349
Show Author Affiliations
A. Orduña-Díaz, CIBA-IPN (Mexico)
M. Rojas-López, CIBA-IPN (Mexico)
R. Delgado-Macuil, CIBA-IPN (Mexico)
Alfonso Torres-Jácome, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
F. J. De la Hidalga-Wade, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Daniel Ferrusca, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Salvador Ventura-Gonzalez, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
C. G. Treviño-Palacios, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)


Published in SPIE Proceedings Vol. 8011:
22nd Congress of the International Commission for Optics: Light for the Development of the World
Ramón Rodríguez-Vera; Ramón Rodríguez-Vera; Ramón Rodríguez-Vera; Rufino Díaz-Uribe; Rufino Díaz-Uribe; Rufino Díaz-Uribe, Editor(s)

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