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Proceedings Paper

Tailoring of photonic structures by femtosecond laser lithography
Author(s): Vygantas Mizeikis; Vytautas Purlys; Domas Paipulas; Lina Maigyte; Kestutis Staliunas
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Paper Abstract

Micro and nano structuring of materials using femtosecond lasers has attracted considerable interest as a tool for fabrication of various photonic devices, such as diffractive elements, photonic crystals (PhC), optical waveguides, etc. Direct Laser Write (DLW) technique based on 3D high-resolution drawing of refractive index modulation structures is especially attractive, since it allows fabrication of 3D photonic micro- and nano-structures without the tediousness of planar microfabrication techniques borrowed from semiconductor industry (e.g., electronbeam lithography, thin film deposition, dry-etching, etc.). Here, we describe application of femtosecond DLW lithography for the fabrication of 3D PhC structures in photoresists and describe application of these structures for collimation of optical beams. Using theoretical analysis and numerical simulations we show that 3D woodpile architecture PhC enables collimation of divergent optical beams via negative diffraction in a 3D periodic structure. Using parameters of 3D woodpile structure obtained from the theoretical analysis, woodpile structures were fabricated by DLW technique and beam collimation in these structures was demonstrated experimentally.

Paper Details

Date Published: 23 December 2011
PDF: 8 pages
Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 820417 (23 December 2011); doi: 10.1117/12.903232
Show Author Affiliations
Vygantas Mizeikis, Shizuoka Univ. (Japan)
Vytautas Purlys, Vilnius Univ. (Lithuania)
Domas Paipulas, Vilnius Univ. (Lithuania)
Lina Maigyte, Univ. Politechnica de Catalunya (Spain)
Kestutis Staliunas, Univ. Politechnica de Catalunya (Spain)

Published in SPIE Proceedings Vol. 8204:
Smart Nano-Micro Materials and Devices
Saulius Juodkazis; Min Gu, Editor(s)

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