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Proceedings Paper

Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution
Author(s): Vassilis Papadakis; Michael A. Everest; Katerina Stamataki; Stelios Tzortzakis; Benoit Loppinet; T. Peter Rakitzis
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Paper Abstract

Cavity-enhanced ellipsometry, using nanosecond pulsed lasers and without moving parts, is demonstrated to have submicrosecond time resolution. The ellipsometric phase angles are measured from the Fourier transform of the cavity ring-down experimental signals, with a sensitivity 0.01 degrees. The technique is applied to highly reflective surfaces, including total internal reflection, where the samples are placed within the evanescent wave. The technique can be generalized to broadband sources, such as from supercontinuum generation, allowing spectral resolution of thin films and monolayer samples.

Paper Details

Date Published: 20 September 2011
PDF: 9 pages
Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 81050L (20 September 2011); doi: 10.1117/12.903053
Show Author Affiliations
Vassilis Papadakis, Foundation for Research and Technology-Hellas (Greece)
Michael A. Everest, Foundation for Research and Technology-Hellas (Greece)
George Fox Univ. (United States)
Katerina Stamataki, Foundation for Research and Technology-Hellas (Greece)
Univ. of Crete (Greece)
Stelios Tzortzakis, Foundation for Research and Technology-Hellas (Greece)
Benoit Loppinet, Foundation for Research and Technology-Hellas (Greece)
T. Peter Rakitzis, Foundation for Research and Technology-Hellas (Greece)
Univ. of Crete (Greece)


Published in SPIE Proceedings Vol. 8105:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Michael T. Postek, Editor(s)

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