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Proceedings Paper

An improved real-time method for removing the cyclic error of a homodyne interferometer
Author(s): Suwen Zhao; Desheng Wen; Shaolan Zhu; Shitong Liang
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Paper Abstract

The nonlinear error of a homodyne interferometer is presented: the amplitudes, the phase and the offsets. An improved compensation method is introduced since the conventional Heydeman modal' calculation is very time-consuming. First, the "zero drift" problem is solved with the polarization phase-shifting technology; second, a fast algorithm based on the Heydeman method is introduced to calculate the errors; and third, electronic circuit is used to remove the nonlinear errors timely. The test result shows that the nonlinearity of the homodyne interferometer could be reduced to subnanometer over the measuring range of 20cm, and the accuracy can be improved more than tenfold by the dynamic compensation method.

Paper Details

Date Published: 23 August 2011
PDF: 8 pages
Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 81924G (23 August 2011); doi: 10.1117/12.902439
Show Author Affiliations
Suwen Zhao, Xi'an Institute of Optics and Precision Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Desheng Wen, Xi'an Institute of Optics and Precision Mechanics (China)
Shaolan Zhu, Xi'an Institute of Optics and Precision Mechanics (China)
Shitong Liang, Xi'an Institute of Optics and Precision Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 8192:
International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging
Farzin Amzajerdian; Weibiao Chen; Chunqing Gao; Tianyu Xie, Editor(s)

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