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Proceedings Paper

Study of PZT thick-film infrared detectors prepared by MEMS technology
Author(s): Xiang-Peng Qiang; Gui-Wu Chuan; Bo-Luo Wen; Li-Zhang Wan; Qiang-Cao Jia
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Paper Abstract

In this paper, a single element integrated infrared detector using screen printed lead zirconate titanate (PZT) thick films on Pt/Ti/Al2O3/SiO2 coated silicon cup has been developed. The thermal insulating micro-bridge of the detector was prepared by Micro-electro-mechanical System (MEMS) technology. To increase the density of PZT ceramic thick films, cool isostatic pressing experiments had been conducted under 300MPa and 30s dwell time. The XRD pattern shows that PZT thick films possess good perovskite structure. The SEM cross section image demonstrate that the PZT film was dense and the thickness is about 25μm. The dielectric constant, loss and pyroelectric coefficient of PZT thick films prepared at optimized conditions is 1100, 1% and 1×10-8C/Kcm 2, respectively. The results indicated that the PZT thermal sensitive layer fabricated by screen printing on the Pt/Ti coated silicon cup with micro-bridge thermal insulation structure, and Al2O3/SiO2 barrier layer show potential application in infrared detectors.

Paper Details

Date Published: 8 September 2011
PDF: 5 pages
Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81934J (8 September 2011); doi: 10.1117/12.901859
Show Author Affiliations
Xiang-Peng Qiang, Univ. of Electronic Science and Technology of China (China)
Gui-Wu Chuan, Univ. of Electronic Science and Technology of China (China)
Bo-Luo Wen, Univ. of Electronic Science and Technology of China (China)
Li-Zhang Wan, Univ. of Electronic Science and Technology of China (China)
Qiang-Cao Jia, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8193:
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications
Jeffery J. Puschell; Junhao Chu; Haimei Gong; Jin Lu, Editor(s)

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