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Proceedings Paper

Simulation and experiment of the static FTIR based on micro multi-step mirrors
Author(s): Jingqiu Liang; Zhong-zhu Liang; Jin-guang Lv; Jian-guo Fu; Ying Zheng; Cong Feng; Wei-biao Wang; Wan-bin Zhu; Jin-song Yao; Jun Zhang
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Paper Abstract

In recent years, Fourier transform spectrometer (FTS) with small size and low mass is required in many applications with growing need for real-time and small platform spectral detection. In this paper, a micro Fourier transform infrared spectrometer (μFTIR) based on spatial modulation mode was designed. This spectrometer has the advantages of high stability and simplified configuration. It also promises optical path differences (OPD) with high precision, as MOEMS technology is used in manufacturing the key components. The simulation and the experiments with regard to this FTIR configuration have been done. Firstly, the diffraction effect of the micro multi-step mirrors (MMSMs) is studied. We discuss the influence to the reversed spectrum by different mirror widths and different diffraction distances. Secondly, we simulate and analyze the influence of the source solid angle to the spectral resolution. Thirdly, we set up the theoretical model of the collimation error which is mainly from the defocus of the optical system and analyze the result caused by the collimation error. Fourthly, a new discrete Fourier transform arithmetic using least-squares cosines progression (LSCP) is proposed which can reconstruct the spectrum with nonuniform sampled signals. Finally, the MMSMs are fabricated used the MOEMS technology and the structural parameters are tested.

Paper Details

Date Published: 8 September 2011
PDF: 8 pages
Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819104 (8 September 2011); doi: 10.1117/12.900952
Show Author Affiliations
Jingqiu Liang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhong-zhu Liang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jin-guang Lv, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jian-guo Fu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Ying Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Cong Feng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Wei-biao Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Wan-bin Zhu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jin-song Yao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jun Zhang, Jinan Univ. (China)


Published in SPIE Proceedings Vol. 8191:
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
Yuelin Wang; Huikai Xie; Yufeng Jin, Editor(s)

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