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Proceedings Paper

A new method to eliminate the noise of vacuum microelectronic high precision accelerometer
Author(s): Hai-tao Liu; Zhi-yu Wen; Li Chen; Zhong-quan Wen; Xue-feng He
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Paper Abstract

The vacuum microelectronic high precision accelerometer was developed based on the vacuum field emission theory; it has many advantages such as high precision, good linearity in theory, but the inherent low frequency such as 1/f noise of the accelerometer decreases the signal-to-noise ratio greatly, and it is the main influencing factors to precision and linearity of accelerometer. In this paper a new method to eliminate noise of vacuum microelectronic high precision accelerometer was first bring forward by using modulation and demodulation and coherent detection technology. The system mainly includes AC signal generator, current obtain, phase shift, demodulator, differential amplification and feedback control. At last, the noise between 0 Hz and 200Hz contrast test experiment of the accelerometer was carried out by oscilloscope, the result shows the mean spectrum density of output signal is 29μV/√Hz between 0 Hz and 200Hz. Static gravitation field rolling experiment in ±1 g is also performed to measure the linearity of the accelerometer; the least-square linear fitting curve shows the maximum nonlinear is 0.41%. Through the results we can draw conclusion that the noise and linear performs have been greatly improved through eliminated noise.

Paper Details

Date Published: 8 September 2011
PDF: 8 pages
Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81911X (8 September 2011); doi: 10.1117/12.900912
Show Author Affiliations
Hai-tao Liu, Chongqing Univ. (China)
Zhi-yu Wen, Chongqing Univ. (China)
Li Chen, Chongqing Univ. (China)
Zhong-quan Wen, Chongqing Univ. (China)
Xue-feng He, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 8191:
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
Yuelin Wang; Huikai Xie; Yufeng Jin, Editor(s)

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