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Proceedings Paper

Far infrared / Terahertz micromechanical imaging-array sensors based on nano-scale optical measurement technology
Author(s): Xiao-min Liu; Bei Wang; Xu Lu; Er-jun Liang; Guo-guang Yang
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Paper Abstract

This paper describes a new concept related to the MEMS(Micro Electro Mechanical system) imaging-array sensors with the structure of micro-cantilever-arrays for detecting far IR and THz radiation. The measure principle is based on an improved optical lever and the core component is a set of micro-displacement measuring device with nano-degree displacement measurement. The amplification coefficient of this improved optical cantilever can reach 102~103 times, combined with a high resolving power to 10-10m. Compared with focal plane arrays sensors, these tape sensors have the ability to measure deformations of micro-cantilever-arrays caused by far IR or THz radiation directly, which can increase the radiation detector sensitivity. The validity of this method is proved by practical experiments. Imaging-array sensors, based on this measure principle, can be made into a new-type MEMS Far IR or THz sensors.

Paper Details

Date Published: 12 August 2011
PDF: 8 pages
Proc. SPIE 8195, International Symposium on Photoelectronic Detection and Imaging 2011: Terahertz Wave Technologies and Applications, 819518 (12 August 2011); doi: 10.1117/12.900788
Show Author Affiliations
Xiao-min Liu, Zhengzhou Univ. (China)
Bei Wang, Henan Univ. (China)
Xu Lu, Zhengzhou Univ. (China)
Er-jun Liang, Zhengzhou Univ. (China)
Guo-guang Yang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 8195:
International Symposium on Photoelectronic Detection and Imaging 2011: Terahertz Wave Technologies and Applications
X.-C. Zhang; Jianquan Yao; Cunlin Zhang; Zhenzhan Wang, Editor(s)

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