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Proceedings Paper

Rapid fabrication of lightweight SiC mirror using CCOS
Author(s): Heng Zhu; Xia-lai Liu; Ding-yao Yan; Ping Ma
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Paper Abstract

A 500mm class SiC flat mirror was polished up to 21nm (RMS value) with CCOS in a very short period. The lightweight mirror structure, the mount method, the choose of the diamond powder, the CCOS procedure is presented in the paper. In addition, the efficiency of the procession is further be analyzed to make the batch production of this kind of hard material mirror be possible.

Paper Details

Date Published: 18 August 2011
PDF: 5 pages
Proc. SPIE 8194, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications, 81942A (18 August 2011); doi: 10.1117/12.900575
Show Author Affiliations
Heng Zhu, Chengdu Fine Optical Engineering Research Ctr. (China)
Xia-lai Liu, Chengdu Fine Optical Engineering Research Ctr. (China)
Ding-yao Yan, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 8194:
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications
Makoto Ikeda; Nanjian Wu; Guangjun Zhang; Kecong Ai, Editor(s)

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