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Proceedings Paper

Research on automatic recognition technology for interference fringes in measurement of thin film thickness
Author(s): Hao-ran Li; Jun-hong Su; Ai-ming Ge; Li-hong Yang
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Paper Abstract

Interference image processing is the key technology of optical interference measurement. Using high resolution image sample system to recognize the interference fringe, which substituted the traditional method measured by technological worker, is improving the measurement accuracy of thin film thickness. This paper introduced the problems on automatic interference fringe processing in absolutely measurement based on laser interference, digital image processing technology. The image acquisition of the SiO2 film and the pre-processing of interferogram was performed. Decimal part of the interference fringes is obtained.

Paper Details

Date Published: 19 August 2011
PDF: 6 pages
Proc. SPIE 8192, International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging, 819224 (19 August 2011); doi: 10.1117/12.900510
Show Author Affiliations
Hao-ran Li, Xi'an Technological Univ. (China)
Jun-hong Su, Xi'an Technological Univ. (China)
Ai-ming Ge, Fudan Univ. (China)
Li-hong Yang, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 8192:
International Symposium on Photoelectronic Detection and Imaging 2011: Laser Sensing and Imaging; and Biological and Medical Applications of Photonics Sensing and Imaging
Farzin Amzajerdian; Weibiao Chen; Chunqing Gao; Tianyu Xie, Editor(s)

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