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Proceedings Paper

Optical correction capability of piezoelectric deformable mirror based on unimorph microactuator array
Author(s): Jianqiang Ma; Yong Liu; Ying Liu; Baoqing Li; Jiaru Chu
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Paper Abstract

Piezoelectric DM based on unimorph microactuator array has advantages of large stroke with low voltage and high operating bandwidth. In this paper, we estimate the correction capability of this DM by fitting Zernike polynomials shapes. First, the influences of actuator arrangement, actuator number and coupling on correction capability were investigated to optimize the correction performance. Then low-order Zernike shapes were reproduced by a fabricated DM using measured influence function matrix. Experiment and simulation results show that the DM has a satisfying correction performance.

Paper Details

Date Published: 8 September 2011
PDF: 6 pages
Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81910Y (8 September 2011); doi: 10.1117/12.900181
Show Author Affiliations
Jianqiang Ma, Univ. of Science and Technology of China (China)
Yong Liu, Univ. of Science and Technology of China (China)
Ying Liu, Univ. of Science and Technology of China (China)
Baoqing Li, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8191:
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
Yuelin Wang; Huikai Xie; Yufeng Jin, Editor(s)

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