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Proceedings Paper

Properties comparison of plasma-deposited SiOx and SiNx films applied to supporting films in an infrared scene projector device
Author(s): Shun Zhou; Weiguo Liu; Changlong Cai; Huan Liu; Wengang Qin; Feng Guo
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Paper Abstract

Microemitter resistor arrays are one popular approach to obtaining an infrared scene projector capable of wide dynamic range. Typically, the array operates in a two-level architecture wherein the array resides suspended on support legs. In the microbridge pixel structure, the support legs films must have low thermal conductivity, high mechanical strength, minimal stress and good thermal stability. Usually, silicon nitride (SiNx) films can meet the requirement and have been used as support films in dynamic infrared scene generation. While compared with the silicon nitride films, the silicon oxide (SiOx) films have a lower thermal conductivity. If the SiOx films can also be used as support films in the device instead of SiNx films, it can reduce the thermal loss further. Namely, the SiOx films can make the pixel to achieve higher temperature and higher radiance with lower power than silicon nitride films do. In this work, SiOx and SiNx films were deposited in a PECVD reactor .The stress, Young modulus, Hardness, thermal stability, and infrared optical absorption properties of the two types of films were investigated and compared.

Paper Details

Date Published: 8 September 2011
PDF: 6 pages
Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81910U (8 September 2011); doi: 10.1117/12.900115
Show Author Affiliations
Shun Zhou, Xi'an Technological Univ. (China)
Xidian Univ. (China)
Weiguo Liu, Xi'an Technological Univ. (China)
Xidian Univ. (China)
Changlong Cai, Xi'an Technological Univ. (China)
Huan Liu, Xi'an Technological Univ. (China)
Wengang Qin, Xi'an Technological Univ. (China)
Feng Guo, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 8191:
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
Yuelin Wang; Huikai Xie; Yufeng Jin, Editor(s)

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