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Proceedings Paper

Reflection coefficients and optical admittances loci monitoring for thin film coatings and its applications to optical systems
Author(s): Cheng-Chung Lee; Kai Wu; Yu-Jen Chen
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Paper Abstract

point. This monitoring method is derived from a traditional optical monitor structure. The corresponding error compensations were applied to get good output. Another optical monitoring system is also demonstrated to extract the temporal phase change of the reflection coefficient of the growing film stack. A vibration and air turbulence insensitive polarization interferometers was used in this system to directly detect fluctuating phase and magnitude of the reflection coefficient of a growing film stack as well as the real time optical admittance at normal incidence.

Paper Details

Date Published: 30 September 2011
PDF: 8 pages
Proc. SPIE 8172, Optical Complex Systems: OCS11, 81720Y (30 September 2011); doi: 10.1117/12.899755
Show Author Affiliations
Cheng-Chung Lee, National Central Univ. (Taiwan)
Kai Wu, National Central Univ. (Taiwan)
Yu-Jen Chen, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8172:
Optical Complex Systems: OCS11
Gérard Berginc, Editor(s)

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