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Proceedings Paper

Phase-image-correlation-based high sensitive optical nanoscope
Author(s): Daesuk Kim; Byung Joon Baek; Andrei V. Zvyagin; Hyungchul Lee; Yong Jai Cho
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Paper Abstract

We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. Since the proposed off-axis scheme based on a matched filter correlation method basically measure the phase information of a nano object, the proposed scheme has some benefits in terms of sensitivity in both 3D geometry measurement and defect inspection capability. In this study, the feasibility of the proposed scheme has been evaluated by combining the conical diffraction and wave propagation simulation codes.

Paper Details

Date Published: 23 August 2011
PDF: 6 pages
Proc. SPIE 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, 81730S (23 August 2011); doi: 10.1117/12.899605
Show Author Affiliations
Daesuk Kim, Chonbuk National Univ. (Korea, Republic of)
Byung Joon Baek, Chonbuk National Univ. (Korea, Republic of)
Andrei V. Zvyagin, Macquarie Univ. (Australia)
Hyungchul Lee, KAIST (Korea, Republic of)
Yong Jai Cho, KRISS (Korea, Republic of)

Published in SPIE Proceedings Vol. 8173:
Photonics 2010: Tenth International Conference on Fiber Optics and Photonics
Sunil K. Khijwania; Banshi D. Gupta; Bishnu P. Pal; Anurag Sharma, Editor(s)

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