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Proceedings Paper

Absolute measurement of absorptance in DUV optics from laser-induced wavefront deformations
Author(s): K. Mann; U. Leinhos; J. Sudradjat; B. Schäfer
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Paper Abstract

A measurement system for quantitative determination of both surface and bulk contributions to the photo-thermal absorption in DUV optics was developed. It is based upon a Hartmann- Shack wavefront sensor with a sensitivity of ~λ/10000 rms, accomplishing precise on-line monitoring of wavefront deformations of a collimated test laser beam transmitted perpendicular through the excimer laser-irradiated site of a cuboid sample. Caused by the temperature dependence of the refractive index as well as thermal expansion, the initially plane wavefront of the test laser is distorted into a cylindrical shape, with bending ends towards the surface. Sign and magnitude depend on index change and expansion. By comparison with thermal theory, this transient wavefront distortion yields a quantitative absolute measure of bulk and surface absorption losses in the sample. First results for fused silica are presented.

Paper Details

Date Published: 28 November 2011
PDF: 7 pages
Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 81901S (28 November 2011); doi: 10.1117/12.899503
Show Author Affiliations
K. Mann, Laser-Lab. Göttingen e.V. (Germany)
U. Leinhos, Laser-Lab. Göttingen e.V. (Germany)
J. Sudradjat, Laser-Lab. Göttingen e.V. (Germany)
B. Schäfer, Laser-Lab. Göttingen e.V. (Germany)


Published in SPIE Proceedings Vol. 8190:
Laser-Induced Damage in Optical Materials: 2011
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editor(s)

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