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Proceedings Paper

Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding
Author(s): John Yan
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Paper Abstract

This paper aims to describe the device operation, microfabrication and measurement results of an array of optically transparent, pressure sensors which exhibit high capacitance-to-pressure sensitivity and reliable operation.

Paper Details

Date Published: 6 February 2012
PDF: 8 pages
Proc. SPIE 8248, Micromachining and Microfabrication Process Technology XVII, 824803 (6 February 2012); doi: 10.1117/12.899493
Show Author Affiliations
John Yan, Univ. of California, Davis (United States)

Published in SPIE Proceedings Vol. 8248:
Micromachining and Microfabrication Process Technology XVII
Mary Ann Maher; Paul J. Resnick, Editor(s)

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