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Proceedings Paper

Infrared camera based on optical-readout bi-material FPA
Author(s): Yan-mei Kong; Rui-wen Liu; Bin-bin Jiao; Da-peng Chen
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Paper Abstract

With the trend of developments of infrared-focal plane array (FPA) which is particularly pronounced in many applications, in this paper, we demonstrated an uncooled infrared (8~14μm) camera based on the optically read-out Bi-material Infrared FPA. We reported on the fabrication and characterization of arrays of bimaterial microcantilevers. On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a substrate-free FPA with the thermal isolated structure SiNx and Au for uncooled infrared imaging is developed, with 49.5μm×49.5μm of the pixel and 240×240 array, moreover, the camera had an average noise equivalent temperature difference (NETD) and a response time of 100mK and 100ms at 7Pa atmospheric pressure, respectively.

Paper Details

Date Published: 8 September 2011
PDF: 6 pages
Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 81930X (8 September 2011); doi: 10.1117/12.899491
Show Author Affiliations
Yan-mei Kong, Institute of Microelectronics (China)
Kunshan MicroOptica Electronic Co. Ltd. (China)
Rui-wen Liu, Institute of Microelectronics (China)
Kunshan MicroOptica Electronic Co. Ltd. (China)
Bin-bin Jiao, Institute of Microelectronics (China)
Kunshan MicroOptica Electronic Co. Ltd. (China)
Da-peng Chen, Institute of Microelectronics (China)
Kunshan MicroOptica Electronic Co. Ltd. (China)


Published in SPIE Proceedings Vol. 8193:
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications
Jeffery J. Puschell; Junhao Chu; Haimei Gong; Jin Lu, Editor(s)

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