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Proceedings Paper

Excimer mirror thin film laser damage competition
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Paper Abstract

Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.

Paper Details

Date Published: 6 December 2011
PDF: 9 pages
Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 819007 (6 December 2011); doi: 10.1117/12.899187
Show Author Affiliations
Christopher J. Stolz, Lawrence Livermore National Lab. (United States)
Holger Blaschke, JENOPTIK Optical Systems GmbH (Germany)
Lars Jensen, Laser Zentrum Hannover e.V. (Germany)
Heinrich Mädebach, Laser Zentrum Hannover e.V. (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 8190:
Laser-Induced Damage in Optical Materials: 2011
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M. J. Soileau, Editor(s)

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