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Proceedings Paper

Experimental investigation on silicon microchannel plate electron multiplier
Author(s): Qingduo Duanmu; Guozheng Wang; Ye Li; Yang Wang; Hongchang Cheng; Xulei Qin; Zhenhua Jiang; Delong Jiang
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Paper Abstract

A Silicon microchannel arrays with the very high aspect ratio was prepared by the photo-assisted electrochemical etching process. The mechanism of silicon anisotropy etching, the process parameters, the inducing pit arrays and the channel morphology were investigated, and the condition of etching current density for steady microchannel growth was discussed. The continuous SiO2 thin film dynode was fabricated by LPCVD process. The insulation, conductive and electron emission layer of the dynodes were studied and prepared. We obtained the samples of silicon microchannel plate with 25 mm of the plate diameter, 4-6 μm of channel side size, 1-2 μm of the channel space, more than 40 of aspect ratio, 7° channel bias angle, and 165 of the electron gain at 680V working voltage. The experimental study on silicon microchannel plate indicates that the process of Silicon microchannel plate in this paper is feasible.

Paper Details

Date Published: 18 August 2011
PDF: 6 pages
Proc. SPIE 8194, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications, 81940G (18 August 2011); doi: 10.1117/12.897420
Show Author Affiliations
Qingduo Duanmu, Changchun Univ. of Science and Technology (China)
Guozheng Wang, Changchun Univ. of Science and Technology (China)
Ye Li, Changchun Univ. of Science and Technology (China)
Yang Wang, Changchun Univ. of Science and Technology (China)
Hongchang Cheng, Changchun Univ. of Science and Technology (China)
Xulei Qin, Changchun Univ. of Science and Technology (China)
Zhenhua Jiang, Changchun Univ. of Science and Technology (China)
Delong Jiang, Changchun Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 8194:
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications
Makoto Ikeda; Nanjian Wu; Guangjun Zhang; Kecong Ai, Editor(s)

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