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Proceedings Paper

Opto-thermal actuation in double layer polymer microcantilevers
Author(s): C. Martin-Olmos; L. G. Villanueva; A. Llobera; A. Voigt; G. Gruetzner; G. Abadal; F. Perez-Murano
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Paper Abstract

Photostructurable polymers, such as SU-8, have large potential impact on the field of MEMS/NEMS, allowing simple fabrication of plastic MEMS/NEMS devices with nearly vertical sidewalls and high aspect ratios using standard photolithographic procedures. Functional properties (as electrical conductivity or photoluminiscence) can be added to a photostructurable polymer by doping the material with nanoparticles and/or nanocrystals. We present here the case in which the resulting material presents opto-thermal properties if it is combined with an undoped polymer. From all the different mechanisms for heating the structure, opto-thermal actuation is interesting from the point of view that it is possible to obtain a mechanical energy transduction without requiring physical contact or proximity interaction, i.e. devices can be moved merely by focusing light on it.

Paper Details

Date Published: 1 September 2011
PDF: 7 pages
Proc. SPIE 8107, Nano-Opto-Mechanical Systems (NOMS), 81070A (1 September 2011); doi: 10.1117/12.897353
Show Author Affiliations
C. Martin-Olmos, Ctr. Nacional de Microelectrónica (Spain)
Instituto de Microelectrónica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
L. G. Villanueva, Ctr. Nacional de Microelectrónica (Spain)
Instituto de Microelectrónica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
A. Llobera, Ctr. Nacional de Microelectrónica (Spain)
Instituto de Microelectrónica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)
A. Voigt, Microresist Technology GmbH (Germany)
G. Gruetzner, Microresist Technology GmbH (Germany)
G. Abadal, Univ. Autònoma de Barcelona (Spain)
F. Perez-Murano, Ctr. Nacional de Microelectrónica (Spain)
Instituto de Microelectrónica de Barcelona (Spain)
Consejo Superior de Investigaciones Científicas (Spain)


Published in SPIE Proceedings Vol. 8107:
Nano-Opto-Mechanical Systems (NOMS)
Jaume Esteve; Eugene M. Terentjev; Eva M. Campo, Editor(s)

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