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Proceedings Paper

Efficient use of grating theories with partially coherent illumination
Author(s): Jani Tervo; Heikki J. Hyvärinen; Toni Saastamoinen; Ismo Vartiainen; Jari Turunen
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Paper Abstract

We discuss how the rigorous grating theory can be extended to cover also partially coherent illumination such that the method stays computationally reasonable. We first discuss the S-matrix formalism if the input field is not a simple plane wave, and then continue the approach to the case of partial coherence. We illustrate the approach by investigating the imaging of a grating in a classical bright-field imaging setup.

Paper Details

Date Published: 5 October 2011
PDF: 8 pages
Proc. SPIE 8171, Physical Optics, 81710F (5 October 2011); doi: 10.1117/12.896805
Show Author Affiliations
Jani Tervo, Univ. of Eastern Finland (Finland)
Heikki J. Hyvärinen, Univ. of Eastern Finland (Finland)
Toni Saastamoinen, Univ. of Eastern Finland (Finland)
Ismo Vartiainen, Univ. of Eastern Finland (Finland)
Jari Turunen, Univ. of Eastern Finland (Finland)


Published in SPIE Proceedings Vol. 8171:
Physical Optics
Daniel G. Smith; Frank Wyrowski; Andreas Erdmann, Editor(s)

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