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Proceedings Paper

Surface metrology system based on bidirectional microdisplays
Author(s): Constanze Grossmann; Franziska Perske; Susanne Zwick; Judith Baumgarten; Bernd Richter; Stefan Riehemann; Uwe Vogel; Gunther Notni; Andreas Tünnermann
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Paper Abstract

Typical optical metrology systems for surface and shape characterization are based on a separated camera and projection unit, yielding to a limitation concerning the miniaturization of the sensor. We present a compact, highly integrated optical distance sensor applying the inverse confocal principle using a bidirectional OLED microdisplay (BiMiD). This microdisplay combines light emitting device (AM-OLED microdisplay) and photo sensitive detectors (photodiode matrix) on one single chip based on OLED-on-CMOS-technology. Comparable to conventional confocal sensors, the object is shifted through the focal plane (±▴z) and the back reflected/scattered light is collected via an special designed optic and detected by the photo sensitive detector elements. The detected photocurrent depends on movement (▴z) of the measurement plane. In contrast to conventional confocal sensors, our inverse confocal sensor detects a minimum of reflected/scattered light if the object is positioned in the focal plane. We present a novel sensor concept as well as system and optical simulations that demonstrate the principle of the novel inverse confocal sensor setup.

Paper Details

Date Published: 21 September 2011
PDF: 11 pages
Proc. SPIE 8167, Optical Design and Engineering IV, 81670Q (21 September 2011); doi: 10.1117/12.896790
Show Author Affiliations
Constanze Grossmann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Franziska Perske, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Susanne Zwick, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Judith Baumgarten, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Bernd Richter, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Stefan Riehemann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Uwe Vogel, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Gunther Notni, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)
Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 8167:
Optical Design and Engineering IV
Jean-Luc M. Tissot; Laurent Mazuray; Rolf Wartmann; Jeffrey M. Raynor; Andrew Wood, Editor(s)

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