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Proceedings Paper

Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques
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Paper Abstract

The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.

Paper Details

Date Published: 4 October 2011
PDF: 10 pages
Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681W (4 October 2011); doi: 10.1117/12.896775
Show Author Affiliations
Olaf Stenzel, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Mark Schürmann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Steffen Wilbrandt, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Norbert Kaiser, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Andreas Tünnermann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Mathias Mende, Laser Zentrum Hannover e.V. (Germany)
Henrik Ehlers, Laser Zentrum Hannover e.V. (Germany)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)
Stefan Bruns, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Michael Vergöhl, Fraunhofer Institute for Surface Engineering and Thin Films (Germany)
Werner Riggers, Laseroptik GmbH (Germany)
Martin Bischoff, Qioptiq Photonics GmbH & Co. KG (Germany)
Mario Held, Bte Bedampfungstechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 8168:
Advances in Optical Thin Films IV
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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