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Proceedings Paper

Application of a dual ion-beam sputtering system for layer thickness and uniformity error correction
Author(s): Mark Gross; Svetlana Dligatch; Anatoli Chtanov
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Proc. SPIE 8168, Advances in Optical Thin Films IV, ; doi: 10.1117/12.896744
Show Author Affiliations
Mark Gross, Commonwealth Scientific and Industrial Research Organisation (Australia)
Svetlana Dligatch, Commonwealth Scientific and Industrial Research Organisation (Australia)
Anatoli Chtanov, Commonwealth Scientific and Industrial Research Organisation (Australia)


Published in SPIE Proceedings Vol. 8168:
Advances in Optical Thin Films IV
Michel Lequime; H. Angus Macleod; Detlev Ristau, Editor(s)

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