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Proceedings Paper

Measurement technology based on laser internal/external cavity tuning
Author(s): Shulian Zhang
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Paper Abstract

For an ordinary laser with two cavity mirrors, if the length of laser cavity changes half wavelength the laser frequency changes one longitudinal mode separation. For a laser with three cavity mirrors, in which a feedback mirror is used to feed part of the laser output beam back into the laser cavity, the external cavity length changes half wavelength the laser intensity fluctuates one period. This presentation gives some research results in measurement field based on changing (tuning) the length of laser internal/external cavity, including 1) HeNe laser cavity-tuning nanometer displacement measurement instruments (laser nanometer rulers), 2) HeNe laser feedback displacement measurement, 3) Nd:YAG laser feedback nanometer displacement measurement, 4) benchmark of waveplate phase retardation measurement based on laser frequency splitting, 5) in-site waveplate phase retardation measurement instruments based on laser feedback and polarization hopping, 6) quasi-common-path microchip Nd:YAG laser feedback interferometer, 7) non-contact Nd:YAG laser feedback surface profile measurement. Some of these instruments have been put into application and display some irreplaceable advantages.

Paper Details

Date Published: 10 September 2011
PDF: 7 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 813302 (10 September 2011); doi: 10.1117/12.895980
Show Author Affiliations
Shulian Zhang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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