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Proceedings Paper

Surface profile measurement using a modified stereo microscope
Author(s): Jian Gao; Xuefeng Qiang; Di Wu; Peisen Huang
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Paper Abstract

In this research, we propose to modify a traditional stereo microscope for quantitative 3-D surface profile measurement based on the combined stereovision and phase shifting method. A simple optical system and a miniature projector are used to project phase-shifted fringe patterns to the object surface. Two identical black-and-white cameras are used to capture the fringe images of the object surface, one for each optical channel of the stereo microscope. The calculated phase maps are used for stereo matching at the sub-pixel level. The 3-D surface profile is reconstructed using the triangulation method. Experimental results are presented to demonstrate the feasibility of the proposed method.

Paper Details

Date Published: 14 September 2011
PDF: 5 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330E (14 September 2011); doi: 10.1117/12.895345
Show Author Affiliations
Jian Gao, Univ. of Michigan-Shanghai Jiao Tong Univ. Joint Institute (China)
Xuefeng Qiang, Univ. of Michigan-Shanghai Jiao Tong Univ. Joint Institute (China)
Di Wu, Univ. of Michigan-Shanghai Jiao Tong Univ. Joint Institute (China)
Peisen Huang, Univ. of Michigan-Shanghai Jiao Tong Univ. Joint Institute (China)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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