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Proceedings Paper

Aspherical surface measurement using quadri-wave lateral shearing interferometry
Author(s): William Boucher; Pascal Delage; Benoit Wattellier
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Paper Abstract

Aspherical surfaces are characterized in reflection using a quadri-wave lateral shearing interferometer (QWLSI). This measures the deformation of a reference source due to the reflection on an aspherical shape. Thanks to the wave front sensor high dynamic range, aspherical sags as large as 100 μm are achieved.

Paper Details

Date Published: 26 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821E (26 May 2011); doi: 10.1117/12.895005
Show Author Affiliations
William Boucher, PHASICS S.A. (France)
Pascal Delage, PHASICS S.A. (France)
Benoit Wattellier, PHASICS S.A. (France)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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