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Proceedings Paper

Diffractive simultaneous lateral shearing interferometry
Author(s): Vanusch Nercissian; Irina Harder; Klaus Mantel; Andreas Berger; Norbert Lindlein
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Paper Abstract

A lateral shearing interferometer usually provides the slope data of a wave front under test along one direction. For the complete reconstruction of the wavefront, two slope datasets along different directions are required. Based on diffractive gratings, a simultaneous measurement of bothdata sets can be carried out. Two possible realizations are presented using a polarization signature and a partially coherent light source.

Paper Details

Date Published: 26 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821D (26 May 2011); doi: 10.1117/12.895004
Show Author Affiliations
Vanusch Nercissian, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Irina Harder, Max Planck Institute for the Science of Light (Germany)
Klaus Mantel, Max Planck Institute for the Science of Light (Germany)
Andreas Berger, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Norbert Lindlein, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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