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Proceedings Paper

High-speed triangulation-based point sensing using phase detection
Author(s): Kevin Harding
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Paper Abstract

Triangulation sensors have been in wide use for many years. Most point sensors use a laser spot, which is detected using either a lateral effect photodiode or a linear detector array. The centroid of the spot is used to determine the range using triangulation. On many engineered surfaces, this spot image may suffer from speckle, surface texture, or other issues that limit the ability to repeatably measure the centroid. Many analysis means, such as fitting of the spot, zero crossing, and averaging methods have been tried to make the sensor more robust to surface influenced noise. This paper will present a system using a split image and phase detection to obtain the range. The speed of the sensor is gained by using simple point photodiodes and a moire effect to obtain the phase measurement. The paper will discuss the pros and cons of this approach, and show results on untreated metal parts.ear)

Paper Details

Date Published: 14 September 2011
PDF: 9 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330B (14 September 2011); doi: 10.1117/12.894906
Show Author Affiliations
Kevin Harding, GE Global Research (United States)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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