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Proceedings Paper

Modeling, error analysis, and compensation in phase-shifting surface profilers
Author(s): Qingying Jim Hu
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Paper Abstract

Optical metrology techniques have been widely used in geometric dimension and shape measurements due to many features such as non-contact measurement, fast measurement speed, digital data format for computerized analysis and visualization, superior resolution, and high accuracy, etc. Among these techniques, phase-shifting based surface profilers have drawn more and more attention due to its full-field measurement and maturing wrapping/unwrapping analysis characteristics. This paper analyzes the error sources in phase-shifting surface profilers, including phaseshifting generation, non-linearity compensation, phase-shifting algorithms, surface contour extraction, modeling, and calibration, etc. Some methods to improve the measurement accuracy through coordinate error compensation are also proposed including transfer functions and look-up table (LUT) methods.

Paper Details

Date Published: 14 September 2011
PDF: 9 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330L (14 September 2011); doi: 10.1117/12.894594
Show Author Affiliations
Qingying Jim Hu, QUEST Integrated, Inc. (United States)

Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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